LAM PARTS

AUTOTUNE BOARD

810-015987-001

DIP BOARD

810-01593-002

810-017003-005

CPU BOARD

810-017034-005

810-017034-300

SOLENOID
INTERLOCK BOARD

810-17004-001

810-17004-004

NETWORK
INTERFACE BOARD

810-707183-001

ADIO BOARD

810-017031-004

GAS BOX
INTERLOCK BOARD

810-017075-003

GAS BOX
MOTHER BOARD

810-017058-002

INTERLOCK BOARD

810-017042-002

STEPPER DRIVER BOARD

810-17016-001

SCRAM BOARD

810-017033-003

Drive Hard Disk Controller(HD DRIVER CONTROLLER)

853-190023-001

9400 ELCTD CAP NOTCHED LT 8″
(下電極)

718-094523-281

ESC (E-chuck)
Aliance 9400 ASSY,
ELCTD, ESC 6″

718-094523-261

CAP ELECTRODE FLAT

715-011629-006

CAP ELECTRODE
THIN EDGE

715-011639-004

Cap, Lower Electrode,
6″ W/Vent Groove
(下電極)

715-011665-006

LAM Aluminum Electrode 6″

715-011531-015

VCI
SENEORBOARD

853-370871-002

Assembly Cable.
LWR Match

853-017410-002

SLEEVE PLUNGER GUIDE

713-011578-001

SPRING,COMP,
300 ODx7/8LG

754-007456-601

Lead Screw Driver

(小)

854-011153-002

Lead Screw Driver

(大)

854-011153-001

LAM 4720
BOTTOM BAFFLE

715-011913-005

BAFFLE, LOWER

715-11913-080

GAS RING

854-011153-001

6″ DFP-2, UPPER ELECTRODE

716-011564-001

PLATE,LOWER
BAFFLE, 6″

715-028627-001

LAM 4520 8″ UPPER ELECTRODE

839-011907-001

SWITCH, VACUUM,
1/4 VCR, 31TORR

768-090455-001

SWITCH, VACUUM,
1/4 VCR

768-090914-001

SWITCH, VACUUM, 5 TORR

768-091910-001

Wasco Pressure
Switch

853-17631-002

LAM LIFTER
WAFER 4 PIN

715-011622-201

WDO OTZ HTD ENDPOINT

716-031052-001

Pressure Switch

768-094193-910

ROBOT
HOLDER,WAFER6″
ARM EXIT

715-012101-006

Cover, Arm Housing

715-012111-003

GATE DOOR PLATE

715-012233-003

Lam Research Arm Housing Assy

853-012100-003

Inner Gate Assembly

853-012230-002

Lam Research Rev.c
Power Module

853-015686-004

PCTFE Stem Tip/Adapter Kit for 6BK and 8BK Series

796-002673-002

Assy,Ca,Arm Sensor Intc,4600, Rev.B

853-015876-101

Lftr, Wfr 4-Pin Flex

715-011622-101

Pin Pump Drive 4 M&W TCU

644-009691-001

Throttle Valve KF50, Tylan General MDVX-018

796-006057-001

SHUTTLE, SPATULA

853-012566-001

OPTICAL SENSOR

853-017633-002

LAM SENSOR

853-017633-009

GAS RING,ESC,
BLACK COATING
(2nd new)

715-330984-001

STRAP,GROUND,
ASSY

839-19104-401

Hollow Plug Hex Head

921-008770-005

DOMED ELECTRODE LEVELING, TOOL HEIGHT 6MM




515-011835-001

CLAMP RING
UPPER

715-011535-001

EDGE RING 6” WAFER CLAMP

715-011749-006

LOWER BAFFLE
PLATE 6”




715-028626-001

Mount, Brake, Gap Motor

715-011133-002

PCB, NODE ROCKER VALVE W/ LCD



710-002895-201